Micro-mechanical sensors using encapsulated built-in resonant strain gauges

H.A.C. Tilmans

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 19 Nov 1991
    EventIOP/FOM Werkgemeenschap Halfgeleiders 1991 - Veldhoven, Netherlands
    Duration: 19 Nov 199120 Nov 1991

    Conference

    ConferenceIOP/FOM Werkgemeenschap Halfgeleiders 1991
    CountryNetherlands
    CityVeldhoven
    Period19/11/9120/11/91

    Keywords

    • METIS-117928

    Cite this