Micro-mechanical sensors using encapsulated built-in resonant strain gauges

H.A.C. Tilmans

Research output: Thesis › PhD Thesis - Research UT, graduation UT

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Fluitman, J.H.J., Supervisor Elwenspoek, M.C., Co-Supervisor
Award date	28 Jan 1993
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	90-90-05746-3
Publication status	Published - 28 Jan 1993

Cite this

@phdthesis{b023c2d22c3e4a33a3e092d53e3a4ee6,

title = "Micro-mechanical sensors using encapsulated built-in resonant strain gauges",

author = "H.A.C. Tilmans",

year = "1993",

month = jan,

day = "28",

language = "English",

isbn = "90-90-05746-3",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}