Micro-mechanical sensors using encapsulated built-in resonant strain gauges

H.A.C. Tilmans

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Fluitman, J.H.J., Supervisor
    • Elwenspoek, Michael Curt, Advisor
    Award date28 Jan 1993
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-9005746-3
    Publication statusPublished - 28 Jan 1993

    Keywords

    • METIS-111363

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