Micro mixer with fast diffusion

Ryo Miyake, R. Miyake, Theodorus S.J. Lammerink, Michael Curt Elwenspoek, J.H.J. Fluitman

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    A new concept for micro-mixing of liquid is introduced and feasibility is demonstrated. The mixer allows fast mixing of small amounts of two liquids and it is application to micro-liquid handling systems [1]. The mixer has a channel for the liquid, an inlet port for the reagent, and a 2.2 mm × 2 mm × 330 μm mixing area, and its bottom has 400 micro-nozzles (15 μm × 15 μm). Through these nozzles, a reagent is injected into the sample liquid, making many micro-plumes. These plumes increase the contact surface between the two liquids drastically, and hasten the speed of the mixing by diffusion. The nozzle holes and channel are etched using KOH into a 3-inch (100)-Si wafer from both sides. The fabrication process is extremely simple. Flow visualization by microscope shows the mixing is complete within a few seconds, and absorptiometry using a pair of optical fibers showed that a homogeneous state of mixing is reached in 1.2 seconds, when the total volume injected is 0.5 μl and the injection flow rate is 0.75 μVs.
    Original languageUndefined
    Title of host publicationProceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
    Place of PublicationPiscataway
    Number of pages6
    ISBN (Print)0-7803-0958-8
    Publication statusPublished - 7 Feb 1993
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1993 - Fort Lauderdale, United States
    Duration: 7 Feb 199310 Feb 1993

    Publication series



    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1993
    Abbreviated titleMEMS
    Country/TerritoryUnited States
    CityFort Lauderdale


    • EWI-14152
    • METIS-114040
    • IR-17145

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