Micro movement

J.H.J. Fluitman, C.J.M. Eijkel

    Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

    Original languageUndefined
    Title of host publicationCOMETT MEMS Micro Actuators
    Place of PublicationNeuchatel
    PublisherFSRM Swiss Foundation for Research in Microtechnology
    Pages75-99
    Publication statusPublished - 1995

    Keywords

    • METIS-116951

    Cite this

    Fluitman, J. H. J., & Eijkel, C. J. M. (1995). Micro movement. In COMETT MEMS Micro Actuators (pp. 75-99). Neuchatel: FSRM Swiss Foundation for Research in Microtechnology.