Micro movement

J.H.J. Fluitman, C.J.M. Eijkel

    Research output: Chapter in Book/Report/Conference proceeding › Chapter › Professional

    Original languageUndefined
    Title of host publicationCOMETT MEMS Micro Actuators
    Place of PublicationNeuchatel
    PublisherFSRM Swiss Foundation for Research in Microtechnology
    Pages75-99
    Publication statusPublished - 1995

    Keywords

    • METIS-116951

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