Micro needles formed by lithography

D.M. Altpeter (Inventor), Johan W. Berenschot (Inventor), Meint J. de Boer (Inventor), Y. Yeshurun (Inventor), M. Hefetz (Inventor)

Research output: PatentProfessional

Original languageUndefined
Patent number152271
Priority date13/10/02
Publication statusIn preparation - 13 Oct 2002

Keywords

  • METIS-208539

Cite this

Altpeter, D. M., Berenschot, J. W., de Boer, M. J., Yeshurun, Y., & Hefetz, M. (2002). Micro needles formed by lithography. Manuscript in preparation. (Patent No. 152271).
Altpeter, D.M. (Inventor) ; Berenschot, Johan W. (Inventor) ; de Boer, Meint J. (Inventor) ; Yeshurun, Y. (Inventor) ; Hefetz, M. (Inventor). / Micro needles formed by lithography. Patent No.: 152271.
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author = "D.M. Altpeter and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and Y. Yeshurun and M. Hefetz",
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month = "10",
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Altpeter, DM, Berenschot, JW, de Boer, MJ, Yeshurun, Y & Hefetz, M 2002, Micro needles formed by lithography, Patent No. 152271.

Micro needles formed by lithography. / Altpeter, D.M. (Inventor); Berenschot, Johan W. (Inventor); de Boer, Meint J. (Inventor); Yeshurun, Y. (Inventor); Hefetz, M. (Inventor).

Patent No.: 152271.

Research output: PatentProfessional

TY - PAT

T1 - Micro needles formed by lithography

AU - Altpeter, D.M.

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - Yeshurun, Y.

AU - Hefetz, M.

PY - 2002/10/13

Y1 - 2002/10/13

KW - METIS-208539

M3 - Patent

M1 - 152271

ER -

Altpeter DM, Berenschot JW, de Boer MJ, Yeshurun Y, Hefetz M, inventors. Micro needles formed by lithography. 152271. 2002 Oct 13.