Micro needles formed by lithography

D.M. Altpeter (Inventor), Johan W. Berenschot (Inventor), Meint J. de Boer (Inventor), Y. Yeshurun (Inventor), M. Hefetz (Inventor)

Research output: Patent

Original languageUndefined
Patent number152271
Priority date13/10/02
Publication statusIn preparation - 13 Oct 2002

Keywords

  • METIS-208539

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