Micro resonant force gauges

Harrie A.C. Tilmans, Miko Elwenspoek, Jan H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

    214 Citations (Scopus)
    153 Downloads (Pure)

    Abstract

    A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.
    Original languageEnglish
    Pages (from-to)35-53
    Number of pages19
    JournalSensors and actuators. A: Physical
    Volume30
    Issue number1-2
    DOIs
    Publication statusPublished - Jan 1992

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