Micro resonant force gauges

Harrie A.C. Tilmans; Miko Elwenspoek; Jan H.J. Fluitman

doi:10.1016/0924-4247(92)80194-8

Micro resonant force gauges

Harrie A.C. Tilmans
, Miko Elwenspoek
, Jan H.J. Fluitman

Research output: Contribution to journal › Article › Academic › peer-review

262 Citations (Scopus)

2495 Downloads (Pure)

Abstract

A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.

Original language	English
Pages (from-to)	35-53
Number of pages	19
Journal	Sensors and Actuators A: Physical
Volume	30
Issue number	1-2
DOIs	https://doi.org/10.1016/0924-4247(92)80194-8
Publication status	Published - Jan 1992

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SDG 9 Industry, Innovation, and Infrastructure

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Cite this

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title = "Micro resonant force gauges",

abstract = "A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.",

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AU - Elwenspoek, Miko

AU - Fluitman, Jan H.J.

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N2 - A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.

AB - A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.

U2 - 10.1016/0924-4247(92)80194-8

DO - 10.1016/0924-4247(92)80194-8

M3 - Article

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EP - 53

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1-2

ER -

Micro resonant force gauges

Abstract

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