Micro system technology, past, present and future

J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

    Original languageUndefined
    Title of host publicationIntroduction to silicon based micromechanical technology and its industrial application
    Place of PublicationDenmark
    PublisherCOMETT COMPASS
    Pages1-41
    Number of pages41
    Publication statusPublished - 1993

    Keywords

    • METIS-112539

    Cite this

    Fluitman, J. H. J. (1993). Micro system technology, past, present and future. In Introduction to silicon based micromechanical technology and its industrial application (pp. 1-41). Denmark: COMETT COMPASS.
    Fluitman, J.H.J. / Micro system technology, past, present and future. Introduction to silicon based micromechanical technology and its industrial application. Denmark : COMETT COMPASS, 1993. pp. 1-41
    @inbook{abaf6b9c70fd4f90b9fb6c38a928370c,
    title = "Micro system technology, past, present and future",
    keywords = "METIS-112539",
    author = "J.H.J. Fluitman",
    year = "1993",
    language = "Undefined",
    pages = "1--41",
    booktitle = "Introduction to silicon based micromechanical technology and its industrial application",
    publisher = "COMETT COMPASS",

    }

    Fluitman, JHJ 1993, Micro system technology, past, present and future. in Introduction to silicon based micromechanical technology and its industrial application. COMETT COMPASS, Denmark, pp. 1-41.

    Micro system technology, past, present and future. / Fluitman, J.H.J.

    Introduction to silicon based micromechanical technology and its industrial application. Denmark : COMETT COMPASS, 1993. p. 1-41.

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

    TY - CHAP

    T1 - Micro system technology, past, present and future

    AU - Fluitman, J.H.J.

    PY - 1993

    Y1 - 1993

    KW - METIS-112539

    M3 - Chapter

    SP - 1

    EP - 41

    BT - Introduction to silicon based micromechanical technology and its industrial application

    PB - COMETT COMPASS

    CY - Denmark

    ER -

    Fluitman JHJ. Micro system technology, past, present and future. In Introduction to silicon based micromechanical technology and its industrial application. Denmark: COMETT COMPASS. 1993. p. 1-41