Micro system technology, past, present and future

J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

    Original languageUndefined
    Title of host publicationIntroduction to silicon based micromechanical technology and its industrial application
    Place of PublicationDenmark
    PublisherCOMETT COMPASS
    Pages1-41
    Number of pages41
    Publication statusPublished - 1993

    Keywords

    • METIS-112539

    Cite this

    Fluitman, J. H. J. (1993). Micro system technology, past, present and future. In Introduction to silicon based micromechanical technology and its industrial application (pp. 1-41). Denmark: COMETT COMPASS.