| Original language | Undefined |
|---|---|
| Title of host publication | Introduction to silicon based micromechanical technology and its industrial application |
| Place of Publication | Denmark |
| Publisher | COMETT COMPASS |
| Pages | 1-41 |
| Number of pages | 41 |
| Publication status | Published - 1993 |
Keywords
- METIS-112539
Cite this
Fluitman, J. H. J. (1993). Micro system technology, past, present and future. In Introduction to silicon based micromechanical technology and its industrial application (pp. 1-41). Denmark: COMETT COMPASS.