|Title of host publication||Introduction to silicon based micromechanical technology and its industrial application|
|Place of Publication||Denmark|
|Number of pages||41|
|Publication status||Published - 1993|
Fluitman, J. H. J. (1993). Micro system technology, past, present and future. In Introduction to silicon based micromechanical technology and its industrial application (pp. 1-41). Denmark: COMETT COMPASS.