| Original language | Undefined |
|---|---|
| Title of host publication | Introduction to silicon based micromechanical technology and its industrial application |
| Place of Publication | Denmark |
| Publisher | COMETT COMPASS |
| Pages | 1-41 |
| Number of pages | 41 |
| Publication status | Published - 1993 |
Keywords
- METIS-112539
Cite this
Fluitman, J. H. J. (1993). Micro system technology, past, present and future. In Introduction to silicon based micromechanical technology and its industrial application (pp. 1-41). Denmark: COMETT COMPASS.
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year = "1993",
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pages = "1--41",
booktitle = "Introduction to silicon based micromechanical technology and its industrial application",
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Fluitman, JHJ 1993, Micro system technology, past, present and future. in Introduction to silicon based micromechanical technology and its industrial application. COMETT COMPASS, Denmark, pp. 1-41.
Micro system technology, past, present and future. / Fluitman, J.H.J.
Introduction to silicon based micromechanical technology and its industrial application. Denmark : COMETT COMPASS, 1993. p. 1-41.Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic
TY - CHAP
T1 - Micro system technology, past, present and future
AU - Fluitman, J.H.J.
PY - 1993
Y1 - 1993
KW - METIS-112539
M3 - Chapter
SP - 1
EP - 41
BT - Introduction to silicon based micromechanical technology and its industrial application
PB - COMETT COMPASS
CY - Denmark
ER -
Fluitman JHJ. Micro system technology, past, present and future. In Introduction to silicon based micromechanical technology and its industrial application. Denmark: COMETT COMPASS. 1993. p. 1-41