Micro system technology, past, present and future

J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

Original language	Undefined
Title of host publication	Introduction to silicon based micromechanical technology and its industrial application
Place of Publication	Denmark
Publisher	COMETT COMPASS
Pages	1-41
Number of pages	41
Publication status	Published - 1993

Keywords

@inbook{abaf6b9c70fd4f90b9fb6c38a928370c,

title = "Micro system technology, past, present and future",

keywords = "METIS-112539",

author = "J.H.J. Fluitman",

year = "1993",

language = "Undefined",

pages = "1--41",

booktitle = "Introduction to silicon based micromechanical technology and its industrial application",

publisher = "COMETT COMPASS",

}