Micro systems technology

J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    The emerging field of Micro Systems Technology is described. Micro Systems Technology can be seen as the meeting of disciplines, a product of convergence along different lines. Apart from the traditional and ever developing line of 'classical' precision engineering, there is a line along micro electronics, micro sensors and actuators. This is the line we focus on in this contribution. The third line worth mentioning is the one along the upcoming field of molecular engineering. The main purpose of this paper is to show the wealth of possibilities and consequently the need for 'integral design' management.
    Original languageUndefined
    Title of host publicationProceedings of the IEEE 1994 Custom Integrated Circuits Conference
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Number of pages8
    ISBN (Print)0-7803-1886-2
    Publication statusPublished - 1 May 1994
    EventIEEE Custom Integrated Circuits Conference 1994 - San Diego, United States
    Duration: 1 May 19944 May 1994


    ConferenceIEEE Custom Integrated Circuits Conference 1994
    CountryUnited States
    CitySan Diego


    • EWI-14106
    • IR-17242
    • METIS-114137

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