Micro systems technology

J.H.J. Fluitman

doi:10.1109/CICC.1994.379679

Micro systems technology

J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

64 Downloads (Pure)

Abstract

The emerging field of Micro Systems Technology is described. Micro Systems Technology can be seen as the meeting of disciplines, a product of convergence along different lines. Apart from the traditional and ever developing line of 'classical' precision engineering, there is a line along micro electronics, micro sensors and actuators. This is the line we focus on in this contribution. The third line worth mentioning is the one along the upcoming field of molecular engineering. The main purpose of this paper is to show the wealth of possibilities and consequently the need for 'integral design' management.

Original language	Undefined
Title of host publication	Proceedings of the IEEE 1994 Custom Integrated Circuits Conference
Place of Publication	Piscataway
Publisher	IEEE Computer Society
Pages	471-478
Number of pages	8
ISBN (Print)	0-7803-1886-2
DOIs	https://doi.org/10.1109/CICC.1994.379679
Publication status	Published - 1 May 1994
Event	IEEE Custom Integrated Circuits Conference 1994 - San Diego, United States Duration: 1 May 1994 → 4 May 1994

Conference

Conference	IEEE Custom Integrated Circuits Conference 1994
Country	United States
City	San Diego
Period	1/05/94 → 4/05/94

Keywords

EWI-14106
IR-17242
METIS-114137

Access to Document

10.1109/CICC.1994.379679

PIEEE_CICC_471
open
00379679
open

Cite this

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title = "Micro systems technology",

abstract = "The emerging field of Micro Systems Technology is described. Micro Systems Technology can be seen as the meeting of disciplines, a product of convergence along different lines. Apart from the traditional and ever developing line of 'classical' precision engineering, there is a line along micro electronics, micro sensors and actuators. This is the line we focus on in this contribution. The third line worth mentioning is the one along the upcoming field of molecular engineering. The main purpose of this paper is to show the wealth of possibilities and consequently the need for 'integral design' management.",

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AB - The emerging field of Micro Systems Technology is described. Micro Systems Technology can be seen as the meeting of disciplines, a product of convergence along different lines. Apart from the traditional and ever developing line of 'classical' precision engineering, there is a line along micro electronics, micro sensors and actuators. This is the line we focus on in this contribution. The third line worth mentioning is the one along the upcoming field of molecular engineering. The main purpose of this paper is to show the wealth of possibilities and consequently the need for 'integral design' management.

KW - EWI-14106

KW - IR-17242

KW - METIS-114137

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