Micro systems technology: problems and challenges

J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

Original language	Undefined
Title of host publication	FSRM Course book "The challenges of microsystems technologies"
Place of Publication	Enschede
Publisher	University of Twente
Pages	3-1-3-22
Publication status	Published - 1997

Keywords

@inbook{dd6909f96be34238aaaa11c27c117272,

title = "Micro systems technology: problems and challenges",

keywords = "METIS-112467",

author = "J.H.J. Fluitman",

year = "1997",

language = "Undefined",

pages = "3--1--3--22",

booktitle = "FSRM Course book {"}The challenges of microsystems technologies{"}",

publisher = "University of Twente",

address = "Netherlands",

}