Microactuators

J.H.J. Fluitman, B. Smidt

    Research output: Book/ReportBookProfessional

    Original languageUndefined
    Place of PublicationZurich
    PublisherSwiss Foundation for Research in Microtechnology FSRM
    Number of pages192
    Publication statusPublished - 1996

    Keywords

    • METIS-116937

    Cite this

    Fluitman, J. H. J., & Smidt, B. (1996). Microactuators. Zurich: Swiss Foundation for Research in Microtechnology FSRM.