Microactuators

J.H.J. Fluitman, B. Smidt

    Research output: Book/Report › Book › Professional

    Original languageUndefined
    Place of PublicationZurich
    PublisherSwiss Foundation for Research in Microtechnology FSRM
    Number of pages192
    Publication statusPublished - 1996

    Keywords

    • METIS-116937

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