@inproceedings{47b29d7501c5438fa3c972e23739d76d,
title = "Microcooling: Study on the application of micromechanical techniques",
keywords = "IR-25638, METIS-130440",
author = "Burger, \{Johannes Faas\} and \{ter Brake\}, \{Hermanus J.M.\} and Elwenspoek, \{Michael Curt\} and Horst Rogalla",
year = "1997",
month = nov,
day = "15",
language = "Undefined",
isbn = "0-306-45511-0",
publisher = "Plenum Press",
pages = "687--696",
editor = "\{Ross (Jr.)\}, \{Ronald G.\}",
booktitle = "Proceedings of the 9th International Cryocooler Conference '96",
address = "United States",
note = "9th International Cryocooler Conference, Cryocoolers-9 1996 ; Conference date: 25-06-1996 Through 27-06-1996",
}