TY - PAT
T1 - Microelectromechanical system component or a microfluidic component comprising a free-hanging or free-standing microchannel
AU - Yariesbouei, Mahdieh
AU - Sparreboom, Wouter
AU - Groenesteijn, Jarno
AU - van Putten, Jack Herman
AU - de Boer, Meint J.
AU - Wiegerink, Remco J.
AU - Veltkamp, Henk-Willem
AU - Yu, Qihui
AU - Rodriguez Olguin, Miguel Angel
AU - Lötters, Joost Conrad
PY - 2021/3/25
Y1 - 2021/3/25
N2 - The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.
AB - The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.
M3 - Patent
M1 - WO2021054829
ER -