Microelectromechanical systems (MEMS)

Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic

Keywords

@article{3455db7006b943d68cd0823fc2e8f54d,

title = "Microelectromechanical systems (MEMS)",

keywords = "METIS-112123, IR-15248",

author = "Elwenspoek, {Michael Curt}",

year = "1993",

language = "Undefined",

volume = "2",

pages = "2--9",

journal = "Sensornieuws",

issn = "1386-3002",

publisher = "Stichting voor de Technische Wetenschappen",

number = "2",

}