Microfabricated electrochemical systems

Shuo Kang, Serge G. Lemay

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

1 Citation (Scopus)

Abstract

The terms microfabrication and micromachining represent a broad set of techniques for systematically creating solid-state structures on the micro-and nanometer scales. Primarily developed by the semiconductor industry as an enabler for cheaper and more complex microelectronics circuitry, the resulting capabilities have since been exploited throughout most other areas of science and technology. In particular, microfabrication, having first become a workhorse of solid-state physics research, has become increasingly common in a variety of wet fields ranging from biophysics and neuroscience to environmental sensing and bioanalytical applications. Lithographic approaches are particularly well matched to the demands of electroanalytical methods due to the latter’s emphasis on solid-state electrodes and electrical signals and a growing interest in micro- and nanoscale systems and processes.

Original languageEnglish
Title of host publicationNanoelectrochemistry
PublisherCRC Press/Balkema
Chapter16
Pages573-599
Number of pages28
ISBN (Electronic)9781466561229
ISBN (Print)9781466561199
DOIs
Publication statusPublished - 1 Jan 2015

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