Microfabricated palladium-silver alloy membranes and their application in hydrogen separation

D.H. Tong, F.C. Gielens, Johannes G.E. Gardeniers, Henricus V. Jansen, C.J.M. van Rijn, Michael Curt Elwenspoek, W. Nijdam

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submicron-thick and defect-free palladium-silver (Pd-Ag) alloy membrane is manufactured using microfabrication technology. The microfabrication process creates a robust wafer-scale membrane module, which can easily be integrated into a holder with gastight connections. High separation fluxes of up to 4 mol of H2/m2·s with a minimal selectivity of 1500 for H2/He at 450 C and 83 kPa of H2 retentate pressure were obtained with this setup. The developed membrane technology has great potential for hydrogen purification and in applications such as dehydrogenation
Original languageUndefined
Pages (from-to)4182-4187
Number of pages6
JournalIndustrial and engineering chemistry research
Issue number15
Publication statusPublished - 25 Jun 2004


  • EWI-10246
  • METIS-218776
  • IR-47842

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