Microfabricated palladium silver alloy membranes and their application in hydrogen separation

H.D. Tong, F.C. Gielens, J.G.E. Gardeniers, H.V. Jansen, C.J.M. van Rijn, M.C. Elwenspoek, W. Nijdam

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    44 Citations (Scopus)
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    Abstract

    A submicron-thick and defect-free palladium-silver (Pd-Ag) alloy membrane is manufactured using microfabrication technology. The microfabrication process creates a robust wafer-scale membrane module, which can easily be integrated into a holder with gastight connections. High separation fluxes of up to 4 mol of H2/m2âs with a minimal selectivity of 1500 for H2/He at 450 °C and 83 kPa of H2 retentate pressure were obtained with this setup. The developed membrane technology has great potential for hydrogen purification and in applications such as dehydrogenation.
    Original languageEnglish
    Pages (from-to)4182-4187
    Number of pages6
    JournalIndustrial & engineering chemistry research
    Volume43
    Issue number15
    DOIs
    Publication statusPublished - 2004

    Keywords

    • 2020 OA procedure

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