Microfabrication of near-field optical probes

A.G.T. Ruiter, M.H.P. Moers, N.F. van Hulst, M. de Boer

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Abstract

Near-field optical microscopy generally uses a tapered optical fiber, which is metal coated, to form a sub-wavelength sized light source. Here, a technique for the fabrication of a new type of probe is described. The new design is based o­n atomic force microscope probes and consists of a silicon nitride cantilever with a solid transparent conical tip. The probes are made using micromechanical techniques, which allow batch fabrication of the probes. A near-field scanning optical microscope system was built to test the probes. This system features force detection by a beam deflection technique and subsequent force feedback together with a conventional optical microscope. A major advantage of the apparatus is the ease at which images are obtained. Results o­n a test sample show that an optical resolution of 300 nm can be obtained together with a simultaneous height image. (C) 1996 American Vacuum Society.
Original languageEnglish
Pages (from-to)597-601
Number of pages5
JournalJournal of vacuum science and technology. B: Microelectronics and nanometer structures
Volume14
Issue number2
DOIs
Publication statusPublished - 1996

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Microfabrication
near fields
probes
Microscopes
optical microscopes
Fabrication
fabrication
Silicon nitride
silicon nitrides
Optical microscopy
Light sources
Optical fibers
deflection
light sources
optical fibers
Metals
microscopes
microscopy
Scanning
Feedback

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Ruiter, A.G.T. ; Moers, M.H.P. ; van Hulst, N.F. ; de Boer, M. / Microfabrication of near-field optical probes. In: Journal of vacuum science and technology. B: Microelectronics and nanometer structures. 1996 ; Vol. 14, No. 2. pp. 597-601.
@article{afc6dc7a24d1414d90c535bacf6a64cd,
title = "Microfabrication of near-field optical probes",
abstract = "Near-field optical microscopy generally uses a tapered optical fiber, which is metal coated, to form a sub-wavelength sized light source. Here, a technique for the fabrication of a new type of probe is described. The new design is based o­n atomic force microscope probes and consists of a silicon nitride cantilever with a solid transparent conical tip. The probes are made using micromechanical techniques, which allow batch fabrication of the probes. A near-field scanning optical microscope system was built to test the probes. This system features force detection by a beam deflection technique and subsequent force feedback together with a conventional optical microscope. A major advantage of the apparatus is the ease at which images are obtained. Results o­n a test sample show that an optical resolution of 300 nm can be obtained together with a simultaneous height image. (C) 1996 American Vacuum Society.",
author = "A.G.T. Ruiter and M.H.P. Moers and {van Hulst}, N.F. and {de Boer}, M.",
year = "1996",
doi = "10.1116/1.589142",
language = "English",
volume = "14",
pages = "597--601",
journal = "Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics",
issn = "2166-2746",
publisher = "AVS Science and Technology Society",
number = "2",

}

Microfabrication of near-field optical probes. / Ruiter, A.G.T.; Moers, M.H.P.; van Hulst, N.F.; de Boer, M.

In: Journal of vacuum science and technology. B: Microelectronics and nanometer structures, Vol. 14, No. 2, 1996, p. 597-601.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Microfabrication of near-field optical probes

AU - Ruiter, A.G.T.

AU - Moers, M.H.P.

AU - van Hulst, N.F.

AU - de Boer, M.

PY - 1996

Y1 - 1996

N2 - Near-field optical microscopy generally uses a tapered optical fiber, which is metal coated, to form a sub-wavelength sized light source. Here, a technique for the fabrication of a new type of probe is described. The new design is based o­n atomic force microscope probes and consists of a silicon nitride cantilever with a solid transparent conical tip. The probes are made using micromechanical techniques, which allow batch fabrication of the probes. A near-field scanning optical microscope system was built to test the probes. This system features force detection by a beam deflection technique and subsequent force feedback together with a conventional optical microscope. A major advantage of the apparatus is the ease at which images are obtained. Results o­n a test sample show that an optical resolution of 300 nm can be obtained together with a simultaneous height image. (C) 1996 American Vacuum Society.

AB - Near-field optical microscopy generally uses a tapered optical fiber, which is metal coated, to form a sub-wavelength sized light source. Here, a technique for the fabrication of a new type of probe is described. The new design is based o­n atomic force microscope probes and consists of a silicon nitride cantilever with a solid transparent conical tip. The probes are made using micromechanical techniques, which allow batch fabrication of the probes. A near-field scanning optical microscope system was built to test the probes. This system features force detection by a beam deflection technique and subsequent force feedback together with a conventional optical microscope. A major advantage of the apparatus is the ease at which images are obtained. Results o­n a test sample show that an optical resolution of 300 nm can be obtained together with a simultaneous height image. (C) 1996 American Vacuum Society.

U2 - 10.1116/1.589142

DO - 10.1116/1.589142

M3 - Article

VL - 14

SP - 597

EP - 601

JO - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

SN - 2166-2746

IS - 2

ER -