Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters

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Abstract

This paper presents a novel microfabrication
technology for highly doped silicon sidewall electrodes
parallel to – and isolated from – the microchannel. The
sidewall electrodes can be utilised for both electrical
and thermal actuation of sensor systems. The
technology is scalable to a wide range of channel
geometries, simplifies the release etch, and allows for
further integration with other Surface Channel
Technology-based systems. Furthermore, the
fabrication technology is demonstrated through the
fabrication of a relative permittivity sensor. The sensor
measures relative permittivity values ranging from 1 to
80, within 3% accuracy of full scale, including water
and water-containing mixtures.
Original languageEnglish
Title of host publicationThe 5th Conference on MicroFluidic Handling Systems
Place of PublicationMunich, Germany
Pages53-56
Publication statusPublished - 21 Feb 2024
Event5th Conference on MicroFluidic Handling Systems, MFHS 2024 - Munich, Germany
Duration: 21 Feb 202423 Feb 2024
Conference number: 5

Conference

Conference5th Conference on MicroFluidic Handling Systems, MFHS 2024
Abbreviated titleMFHS 2024
Country/TerritoryGermany
CityMunich
Period21/02/2423/02/24

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