Abstract
This paper presents a novel microfabrication
technology for highly doped silicon sidewall electrodes
parallel to – and isolated from – the microchannel. The
sidewall electrodes can be utilised for both electrical
and thermal actuation of sensor systems. The
technology is scalable to a wide range of channel
geometries, simplifies the release etch, and allows for
further integration with other Surface Channel
Technology-based systems. Furthermore, the
fabrication technology is demonstrated through the
fabrication of a relative permittivity sensor. The sensor
measures relative permittivity values ranging from 1 to
80, within 3% accuracy of full scale, including water
and water-containing mixtures.
technology for highly doped silicon sidewall electrodes
parallel to – and isolated from – the microchannel. The
sidewall electrodes can be utilised for both electrical
and thermal actuation of sensor systems. The
technology is scalable to a wide range of channel
geometries, simplifies the release etch, and allows for
further integration with other Surface Channel
Technology-based systems. Furthermore, the
fabrication technology is demonstrated through the
fabrication of a relative permittivity sensor. The sensor
measures relative permittivity values ranging from 1 to
80, within 3% accuracy of full scale, including water
and water-containing mixtures.
| Original language | English |
|---|---|
| Title of host publication | The 5th Conference on MicroFluidic Handling Systems |
| Place of Publication | Munich, Germany |
| Pages | 53-56 |
| Publication status | Published - 21 Feb 2024 |
| Event | 5th Conference on MicroFluidic Handling Systems, MFHS 2024 - Munich, Germany Duration: 21 Feb 2024 → 23 Feb 2024 Conference number: 5 |
Conference
| Conference | 5th Conference on MicroFluidic Handling Systems, MFHS 2024 |
|---|---|
| Abbreviated title | MFHS 2024 |
| Country/Territory | Germany |
| City | Munich |
| Period | 21/02/24 → 23/02/24 |
