Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters

Maarten J.S. Bonnema; Henk-Willem  Veltkamp; Remco J. Wiegerink; Joost Conrad Lötters

Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

This paper presents a novel microfabrication
technology for highly doped silicon sidewall electrodes
parallel to – and isolated from – the microchannel. The
sidewall electrodes can be utilised for both electrical
and thermal actuation of sensor systems. The
technology is scalable to a wide range of channel
geometries, simplifies the release etch, and allows for
further integration with other Surface Channel
Technology-based systems. Furthermore, the
fabrication technology is demonstrated through the
fabrication of a relative permittivity sensor. The sensor
measures relative permittivity values ranging from 1 to
80, within 3% accuracy of full scale, including water
and water-containing mixtures.

Original language	English
Title of host publication	The 5th Conference on MicroFluidic Handling Systems
Place of Publication	Munich, Germany
Pages	53-56
Publication status	Published - 21 Feb 2024
Event	5th Conference on MicroFluidic Handling Systems, MFHS 2024 - Munich, Germany Duration: 21 Feb 2024 → 23 Feb 2024 Conference number: 5

Conference

Conference	5th Conference on MicroFluidic Handling Systems, MFHS 2024
Abbreviated title	MFHS 2024
Country/Territory	Germany
City	Munich
Period	21/02/24 → 23/02/24

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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ArticleFinal published version, 1.17 MB
Proceedings MFHS 2024Final published version, 37.4 MB

Cite this

@inproceedings{20c54e7abc0547d381d6bf2c2ff72b76,

title = "Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters",

abstract = "This paper presents a novel microfabrication technology for highly doped silicon sidewall electrodes parallel to – and isolated from – the microchannel. The sidewall electrodes can be utilised for both electrical and thermal actuation of sensor systems. The technology is scalable to a wide range of channel geometries, simplifies the release etch, and allows for further integration with other Surface Channel Technology-based systems. Furthermore, the fabrication technology is demonstrated through the fabrication of a relative permittivity sensor. The sensor measures relative permittivity values ranging from 1 to 80, within 3\% accuracy of full scale, including water and water-containing mixtures.",

author = "Bonnema, \{Maarten J.S.\} and Henk-Willem Veltkamp and Wiegerink, \{Remco J.\} and L{\"o}tters, \{Joost Conrad\}",

year = "2024",

month = feb,

day = "21",

language = "English",

pages = "53--56",

booktitle = "The 5th Conference on MicroFluidic Handling Systems",

note = "5th Conference on MicroFluidic Handling Systems, MFHS 2024, MFHS 2024 ; Conference date: 21-02-2024 Through 23-02-2024",

}

TY - GEN

T1 - Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters

AU - Bonnema, Maarten J.S.

AU - Veltkamp, Henk-Willem

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

N1 - Conference code: 5

PY - 2024/2/21

Y1 - 2024/2/21

N2 - This paper presents a novel microfabrication technology for highly doped silicon sidewall electrodes parallel to – and isolated from – the microchannel. The sidewall electrodes can be utilised for both electrical and thermal actuation of sensor systems. The technology is scalable to a wide range of channel geometries, simplifies the release etch, and allows for further integration with other Surface Channel Technology-based systems. Furthermore, the fabrication technology is demonstrated through the fabrication of a relative permittivity sensor. The sensor measures relative permittivity values ranging from 1 to 80, within 3% accuracy of full scale, including water and water-containing mixtures.

AB - This paper presents a novel microfabrication technology for highly doped silicon sidewall electrodes parallel to – and isolated from – the microchannel. The sidewall electrodes can be utilised for both electrical and thermal actuation of sensor systems. The technology is scalable to a wide range of channel geometries, simplifies the release etch, and allows for further integration with other Surface Channel Technology-based systems. Furthermore, the fabrication technology is demonstrated through the fabrication of a relative permittivity sensor. The sensor measures relative permittivity values ranging from 1 to 80, within 3% accuracy of full scale, including water and water-containing mixtures.

M3 - Conference contribution

SP - 53

EP - 56

BT - The 5th Conference on MicroFluidic Handling Systems

CY - Munich, Germany

T2 - 5th Conference on MicroFluidic Handling Systems, MFHS 2024

Y2 - 21 February 2024 through 23 February 2024

ER -

Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters

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Conference

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