Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

68 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Microfabrication Technology for Isolated Silicon Sidewall Electrodes and Heaters'. Together they form a unique fingerprint.

Engineering

Chemical Engineering