Microfluidic device

Stefan Schlautmann; Albert van den Berg; Johannes G.E. Gardeniers

Microfluidic device

Research output: Patent

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Abstract

The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; g) bonding the first substrate on the planarized second layer of the second substrate.

Original language	English
Patent number	US20070843124
Priority date	13/12/07
Publication status	Submitted - 22 Aug 2007

Keywords

EWI-11312
METIS-245749
IR-61989

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title = "Microfluidic device",

abstract = "The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; g) bonding the first substrate on the planarized second layer of the second substrate.",

keywords = "EWI-11312, METIS-245749, IR-61989",

author = "Stefan Schlautmann and \{van den Berg\}, Albert and Gardeniers, \{Johannes G.E.\}",

year = "2007",

month = aug,

day = "22",

language = "English",

type = "Patent",

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T1 - Microfluidic device

AU - Schlautmann, Stefan

AU - van den Berg, Albert

AU - Gardeniers, Johannes G.E.

PY - 2007/8/22

Y1 - 2007/8/22

N2 - The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; g) bonding the first substrate on the planarized second layer of the second substrate.

AB - The present invention relates to a method of fabricating a microfluidic device including at least two substrates provided with a fluid channel, comprising the steps of: a) etching at least a channel and one or more fluid ports in a first and/or a second substrate; b) depositing a first layer on a surface of the second substrate; c) partially removing the first layer in accordance with a predefined geometry; d) depositing a second layer on top of the first layer and the substrate surface; e) planarizing the second layer so as to smooth the upper surface thereof; f) aligning the first and second substrate; g) bonding the first substrate on the planarized second layer of the second substrate.

KW - EWI-11312

KW - METIS-245749

KW - IR-61989

M3 - Patent

M1 - US20070843124

ER -

Microfluidic device

Abstract

Keywords

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