Micromachined capacitive displacement sensor for long-range nano-positioning

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

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    Integrated long-range position sensing with high accuracy will be of paramount importance for high-potential applications in a.o. future probe-based datastorage and microscopy applications [1], provided that nm position accuracy can be obtained over a range of tens of micrometers or more. This work presents the design, fabrication and measurements for an integrated incremental capacitive long-range position sensor for nano-positioning of microactuators. For compactness, economical viability and optimal performance, the aim has been to fully integrate sensor and actuator through micromachining technology, without additional micro-assembly. Two related concepts are presented and evaluated through analysis, 2D-Finite-Element Simulations and experimental assessment. The sensors consist of two periodic geometries (period ≈ 8-16μm) on resp. a slider, movable in x-direction, and sense-structures, movable in y-direction, at both sides of the slider, Fig. 1. In ICMM the displacement of the slider is measured by measuring the periodic change in capacitance ΔCs(x) with a charge-amplifier and synchronous detection technique [2]. Using sense-actuators, the gap-distance between sense-structures and slider is made smaller than is possible with standard available photo-lithography (< 2 μm), thus increasing the capacitance and the S-N Ratio.
    Original languageUndefined
    Number of pages1
    Publication statusPublished - 28 Feb 2005
    Event3rd International Probe Storage Workshop, IPSW 2005 - Zürich, Switzerland
    Duration: 28 Feb 20051 Mar 2005
    Conference number: 3


    Conference3rd International Probe Storage Workshop, IPSW 2005
    Abbreviated titleIPSW III


    • METIS-228601
    • micro actuator
    • Capacitive position sensor
    • synchronous detection
    • nano-position control
    • IR-54431

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