Micromachined capacitive long-range displacement sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 2003
Event	MESA+ Day 2003 - University of Twente, Enschede, Netherlands Duration: 2 Oct 2003 → 2 Oct 2003

Keywords

@conference{7888c8879abf4d3982737d314779b341,

title = "Micromachined capacitive long-range displacement sensor",

keywords = "METIS-216934",

author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",

year = "2003",

language = "Undefined",

pages = "--",

note = "MESA+ Day 2003 ; Conference date: 02-10-2003 Through 02-10-2003",

}