First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.
|Title of host publication||Proceedings of EuroSensors Conference 2003|
|Place of Publication||Portugal|
|Number of pages||4|
|Publication status||Published - 1 Sep 2003|
|Event||Eurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal|
Duration: 21 Sep 2003 → 24 Sep 2003
|Conference||Eurosensors XVII, European Conference on Solid-State Transducers|
|Period||21/09/03 → 24/09/03|
Kuijpers, A. A., Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J., & Elwenspoek, M. C. (2003). Micromachined capacitive long-range displacement sensor. In Proceedings of EuroSensors Conference 2003 (pp. -). Portugal.