Micromachined capacitive long-range displacement sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    Abstract

    First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.
    Original languageUndefined
    Title of host publicationProceedings of EuroSensors Conference 2003
    Place of PublicationPortugal
    Pages-
    Number of pages4
    Publication statusPublished - 1 Sep 2003
    EventEurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal
    Duration: 21 Sep 200324 Sep 2003

    Conference

    ConferenceEurosensors XVII, European Conference on Solid-State Transducers
    CountryPortugal
    CityGuimaraes
    Period21/09/0324/09/03

    Keywords

    • METIS-215251
    • IR-46526

    Cite this

    Kuijpers, A. A., Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J., & Elwenspoek, M. C. (2003). Micromachined capacitive long-range displacement sensor. In Proceedings of EuroSensors Conference 2003 (pp. -). Portugal.
    Kuijpers, A.A. ; Krijnen, Gijsbertus J.M. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; Elwenspoek, Michael Curt. / Micromachined capacitive long-range displacement sensor. Proceedings of EuroSensors Conference 2003. Portugal, 2003. pp. -
    @inproceedings{2ec16079a5ed41a2a4604ea9a8f357a8,
    title = "Micromachined capacitive long-range displacement sensor",
    abstract = "First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.",
    keywords = "METIS-215251, IR-46526",
    author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",
    year = "2003",
    month = "9",
    day = "1",
    language = "Undefined",
    isbn = "9789729860317",
    pages = "--",
    booktitle = "Proceedings of EuroSensors Conference 2003",

    }

    Kuijpers, AA, Krijnen, GJM, Lammerink, TSJ, Wiegerink, RJ & Elwenspoek, MC 2003, Micromachined capacitive long-range displacement sensor. in Proceedings of EuroSensors Conference 2003. Portugal, pp. -, Eurosensors XVII, European Conference on Solid-State Transducers, Guimaraes, Portugal, 21/09/03.

    Micromachined capacitive long-range displacement sensor. / Kuijpers, A.A.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Elwenspoek, Michael Curt.

    Proceedings of EuroSensors Conference 2003. Portugal, 2003. p. -.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Micromachined capacitive long-range displacement sensor

    AU - Kuijpers, A.A.

    AU - Krijnen, Gijsbertus J.M.

    AU - Lammerink, Theodorus S.J.

    AU - Wiegerink, Remco J.

    AU - Elwenspoek, Michael Curt

    PY - 2003/9/1

    Y1 - 2003/9/1

    N2 - First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.

    AB - First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.

    KW - METIS-215251

    KW - IR-46526

    M3 - Conference contribution

    SN - 9789729860317

    SP - -

    BT - Proceedings of EuroSensors Conference 2003

    CY - Portugal

    ER -

    Kuijpers AA, Krijnen GJM, Lammerink TSJ, Wiegerink RJ, Elwenspoek MC. Micromachined capacitive long-range displacement sensor. In Proceedings of EuroSensors Conference 2003. Portugal. 2003. p. -