Micromachined capacitive long-range displacement sensor

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.
Original languageUndefined
Title of host publicationProceedings of EuroSensors Conference 2003
Place of PublicationPortugal
Pages-
Number of pages4
Publication statusPublished - 1 Sep 2003
EventEurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal
Duration: 21 Sep 200324 Sep 2003

Conference

ConferenceEurosensors XVII, European Conference on Solid-State Transducers
CountryPortugal
CityGuimaraes
Period21/09/0324/09/03

Keywords

  • METIS-215251
  • IR-46526

Cite this

Kuijpers, A. A., Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J., & Elwenspoek, M. C. (2003). Micromachined capacitive long-range displacement sensor. In Proceedings of EuroSensors Conference 2003 (pp. -). Portugal.
@inproceedings{2ec16079a5ed41a2a4604ea9a8f357a8,
title = "Micromachined capacitive long-range displacement sensor",
abstract = "First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.",
keywords = "METIS-215251, IR-46526",
author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",
year = "2003",
month = "9",
day = "1",
language = "Undefined",
isbn = "9789729860317",
pages = "--",
booktitle = "Proceedings of EuroSensors Conference 2003",

}

Kuijpers, AA, Krijnen, GJM, Lammerink, TSJ, Wiegerink, RJ & Elwenspoek, MC 2003, Micromachined capacitive long-range displacement sensor. in Proceedings of EuroSensors Conference 2003. Portugal, pp. -, Eurosensors XVII, European Conference on Solid-State Transducers, Guimaraes, Portugal, 21/09/03.

Micromachined capacitive long-range displacement sensor. / Kuijpers, A.A.; Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Elwenspoek, Michael Curt.

Proceedings of EuroSensors Conference 2003. Portugal, 2003. p. -.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Micromachined capacitive long-range displacement sensor

AU - Kuijpers, A.A.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

PY - 2003/9/1

Y1 - 2003/9/1

N2 - First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.

AB - First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.

KW - METIS-215251

KW - IR-46526

M3 - Conference contribution

SN - 9789729860317

SP - -

BT - Proceedings of EuroSensors Conference 2003

CY - Portugal

ER -

Kuijpers AA, Krijnen GJM, Lammerink TSJ, Wiegerink RJ, Elwenspoek MC. Micromachined capacitive long-range displacement sensor. In Proceedings of EuroSensors Conference 2003. Portugal. 2003. p. -