Micromachined capacitive long-range displacement sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

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    Abstract

    First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.
    Original languageUndefined
    Title of host publicationProceedings of EuroSensors Conference 2003
    Place of PublicationPortugal
    Pages-
    Number of pages4
    Publication statusPublished - 1 Sep 2003
    EventEurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal
    Duration: 21 Sep 200324 Sep 2003

    Conference

    ConferenceEurosensors XVII, European Conference on Solid-State Transducers
    CountryPortugal
    CityGuimaraes
    Period21/09/0324/09/03

    Keywords

    • METIS-215251
    • IR-46526

    Cite this

    Kuijpers, A. A., Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J., & Elwenspoek, M. C. (2003). Micromachined capacitive long-range displacement sensor. In Proceedings of EuroSensors Conference 2003 (pp. -). Portugal.