Micromachined capacitive long-range displacement sensor

A.A. Kuijpers; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Remco J. Wiegerink; Michael Curt Elwenspoek

Micromachined capacitive long-range displacement sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.

Original language	Undefined
Title of host publication	Proceedings of EuroSensors Conference 2003
Place of Publication	Portugal
Pages	-
Number of pages	4
Publication status	Published - 1 Sept 2003
Event	Eurosensors XVII, European Conference on Solid-State Transducers - Guimaraes, Portugal Duration: 21 Sept 2003 → 24 Sept 2003

Conference

Conference	Eurosensors XVII, European Conference on Solid-State Transducers
Country/Territory	Portugal
City	Guimaraes
Period	21/09/03 → 24/09/03

Keywords

METIS-215251
IR-46526

Access to Document

Kuijpers03micro

Cite this

@inproceedings{2ec16079a5ed41a2a4604ea9a8f357a8,

title = "Micromachined capacitive long-range displacement sensor",

abstract = "First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.",

keywords = "METIS-215251, IR-46526",

author = "A.A. Kuijpers and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",

year = "2003",

month = sep,

day = "1",

language = "Undefined",

isbn = "9789729860317",

pages = "--",

booktitle = "Proceedings of EuroSensors Conference 2003",

note = "Eurosensors XVII, European Conference on Solid-State Transducers ; Conference date: 21-09-2003 Through 24-09-2003",

}

TY - GEN

T1 - Micromachined capacitive long-range displacement sensor

AU - Kuijpers, A.A.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

AU - Elwenspoek, Michael Curt

PY - 2003/9/1

Y1 - 2003/9/1

N2 - First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.

AB - First measurement results are presented for a surface-micromachined long-range (50– 100 μm) periodic capacitive position sensor. The sensor consists of two periodic geometries (period = 10 μm) sliding along each other with minimum spacing of about 1.5 μm. The relative displacement between the two, results in a periodic change in capacitance. An electrostatic comb-drive actuator is employed to generate displacements. Measured maximum capacitance change ΔC=0.72 fF corresponds to simulation results but needs better shielding from external noise sources. The results show this sensorconcept can potentially lead towards long-range nano-positioning control of microactuator systems.

KW - METIS-215251

KW - IR-46526

M3 - Conference contribution

SN - 9789729860317

SP - -

BT - Proceedings of EuroSensors Conference 2003

CY - Portugal

T2 - Eurosensors XVII, European Conference on Solid-State Transducers

Y2 - 21 September 2003 through 24 September 2003

ER -