Micromachined capacitive long-range displacement sensor

A.A. Kuijpers, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    113 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Micromachined capacitive long-range displacement sensor'. Together they form a unique fingerprint.