Micromachined cryogenic cooler for cooling electronic devices down to 30 K

Engineering

• Microcooler 100%
• Electronic Devices 100%
• Stages 80%
• Cryogenic Temperature 40%
• Sensor 40%
• High Pressure 20%
• Networks (Circuits) 20%
• Demonstrates 20%
• Pressure Gas 20%
• Performance 20%
• Space Application 20%
• Moving Part 20%
• Applications 20%
• Yields 20%
• Medical Applications 20%
• Electronics 20%
• Ambient Temperature 20%
• Development 20%
• Fabrication 20%
• State Transition 20%
• Hydrogen Gas 20%