Micromachined Fabry-Perot interferometer with embedded nanochannels for nanoscale fluid dynamics

K.M. van Delft, Jan C.T. Eijkel, D. Mijatovic, T. Druzhinina, H. Rathgen, Niels Roelof Tas, Albert van den Berg, Friedrich Gunther Mugele

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We describe a microfabricated Fabry-Perot interferometer with nanochannels of various heights between 6 and 20 nm embedded in its cavity. By multiple beam interferometry, the device enables the study of liquid behavior in the nanochannels without using fluorescent substances. During filling studies of ethanol and water, an intriguing filling mode for partially wetting water was observed, tentatively attributed to the entrapment of a large amount of gas inside the channels.
Original languageUndefined
Pages (from-to)345-350
Number of pages6
JournalNano letters
Issue number2
Publication statusPublished - Feb 2007


  • EWI-9711
  • METIS-240090
  • IR-57946

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