Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition

S. Deladi, N.R. Tas, J.W. Berenschot, M.J. de Boer, G.J.M. Krijnen, M.C. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    6 Citations (Scopus)
    69 Downloads (Pure)

    Abstract

    We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.
    Original languageEnglish
    Title of host publication18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
    Place of PublicationLos Alamitos, CA
    PublisherIEEE Computer Society Press
    Pages564-567
    Number of pages4
    ISBN (Print)0-7803-8732-5
    DOIs
    Publication statusPublished - 2005
    Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States
    Duration: 30 Jan 20053 Feb 2005
    Conference number: 18

    Publication series

    NameIEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    PublisherIEEE
    Volume2005
    ISSN (Print)1084-6999

    Conference

    Conference18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
    Abbreviated titleMEMS
    CountryUnited States
    CityMiami Beach
    Period30/01/053/02/05

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