Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition

S. Deladi; N.R. Tas; J.W. Berenschot; M.J. de Boer; G.J.M. Krijnen; M.C. Elwenspoek

doi:10.1109/MEMSYS.2005.1453992

Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition

S. Deladi, N.R. Tas, J.W. Berenschot, M.J. de Boer, G.J.M. Krijnen, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)

77 Downloads (Pure)

Abstract

We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.

Original language	English
Title of host publication	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
Place of Publication	Los Alamitos, CA
Publisher	IEEE Computer Society Press
Pages	564-567
Number of pages	4
ISBN (Print)	0-7803-8732-5
DOIs	https://doi.org/10.1109/MEMSYS.2005.1453992
Publication status	Published - 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States Duration: 30 Jan 2005 → 3 Feb 2005 Conference number: 18

Publication series

Name	IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	IEEE
Volume	2005
ISSN (Print)	1084-6999

Conference

Conference	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
Abbreviated title	MEMS
Country/Territory	United States
City	Miami Beach
Period	30/01/05 → 3/02/05

Access to Document

10.1109/MEMSYS.2005.1453992

Cite this

Deladi, S., Tas, N. R., Berenschot, J. W., de Boer, M. J., Krijnen, G. J. M., & Elwenspoek, M. C. (2005). Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. In 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 (pp. 564-567). (IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2005). IEEE Computer Society Press. https://doi.org/10.1109/MEMSYS.2005.1453992

Deladi, S. ; Tas, N.R. ; Berenschot, J.W. ; de Boer, M.J. ; Krijnen, G.J.M. ; Elwenspoek, M.C. / Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005. Los Alamitos, CA : IEEE Computer Society Press, 2005. pp. 564-567 (IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{a5d1e11ff23c4015b02ab49872d73972,

title = "Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition",

abstract = "We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.",

author = "S. Deladi and N.R. Tas and J.W. Berenschot and {de Boer}, M.J. and G.J.M. Krijnen and M.C. Elwenspoek",

year = "2005",

doi = "10.1109/MEMSYS.2005.1453992",

language = "English",

isbn = "0-7803-8732-5",

series = "IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE Computer Society Press",

pages = "564--567",

booktitle = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005",

note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, MEMS ; Conference date: 30-01-2005 Through 03-02-2005",

}

Deladi, S, Tas, NR , Berenschot, JW, de Boer, MJ, Krijnen, GJM & Elwenspoek, MC 2005, Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. in 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005. IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2005, IEEE Computer Society Press, Los Alamitos, CA, pp. 564-567, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, Florida, United States, 30/01/05. https://doi.org/10.1109/MEMSYS.2005.1453992

Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. / Deladi, S.; Tas, N.R.; Berenschot, J.W.; de Boer, M.J.; Krijnen, G.J.M.; Elwenspoek, M.C.

18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005. Los Alamitos, CA : IEEE Computer Society Press, 2005. p. 564-567 (IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition

AU - Deladi, S.

AU - Tas, N.R.

AU - Berenschot, J.W.

AU - de Boer, M.J.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

N1 - Conference code: 18

PY - 2005

Y1 - 2005

N2 - We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.

AB - We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.

U2 - 10.1109/MEMSYS.2005.1453992

DO - 10.1109/MEMSYS.2005.1453992

M3 - Conference contribution

SN - 0-7803-8732-5

T3 - IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 564

EP - 567

BT - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005

PB - IEEE Computer Society Press

CY - Los Alamitos, CA

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005

Y2 - 30 January 2005 through 3 February 2005

ER -

Deladi S, Tas NR , Berenschot JW, de Boer MJ, Krijnen GJM, Elwenspoek MC. Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. In 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005. Los Alamitos, CA: IEEE Computer Society Press. 2005. p. 564-567. (IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2005.1453992

Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition

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