Abstract
We present a device that enables nanoelectrochemical deposition using atomic force microscope. The micromachined fountain pen is a probe that consists of a fluidic reservoir, fluidic channels encapsulated in cantilevers and a pyramidal probe tip by which the fluid transfer to the sample surface takes place. Electrochemical metal deposition occurs on a sample surface when electrical current is driven through the electrical circuit, which is closed by the electrolyte solution. The smallest features that we succeeded depositing with this technique up till now are 3 nm high and 250 nm wide.
Original language | English |
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Title of host publication | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 |
Place of Publication | Los Alamitos, CA |
Publisher | IEEE Computer Society Press |
Pages | 564-567 |
Number of pages | 4 |
ISBN (Print) | 0-7803-8732-5 |
DOIs | |
Publication status | Published - 2005 |
Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States Duration: 30 Jan 2005 → 3 Feb 2005 Conference number: 18 |
Publication series
Name | IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
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Publisher | IEEE |
Volume | 2005 |
ISSN (Print) | 1084-6999 |
Conference
Conference | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 |
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Abbreviated title | MEMS |
Country | United States |
City | Miami Beach |
Period | 30/01/05 → 3/02/05 |