Micromachined fountain pen for atomic force microscope-based nanopatterning

S. Deladi, Niels Roelof Tas, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Meint J. de Boer, J.H. de Boer, M. Péter, Michael Curt Elwenspoek

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    Abstract

    We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.
    Original languageUndefined
    Pages (from-to)5361-5363
    Number of pages3
    JournalApplied physics letters
    Volume85
    Issue number22
    DOIs
    Publication statusPublished - 29 Nov 2004

    Keywords

    • EWI-10030
    • METIS-219722
    • IR-48341

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