Abstract
We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.
Original language | Undefined |
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Pages (from-to) | 5361-5363 |
Number of pages | 3 |
Journal | Applied physics letters |
Volume | 85 |
Issue number | 22 |
DOIs | |
Publication status | Published - 29 Nov 2004 |
Keywords
- EWI-10030
- METIS-219722
- IR-48341