Micromachined fountain pen for atomic force microscope-based nanopatterning

S. Deladi; Niels Roelof Tas; Johan W. Berenschot; Gijsbertus J.M. Krijnen; Meint J. de Boer; J.H. de Boer; M. Péter; Michael Curt Elwenspoek

doi:10.1063/1.1823040

Micromachined fountain pen for atomic force microscope-based nanopatterning

S. Deladi
, Niels Roelof Tas
, Johan W. Berenschot
, Gijsbertus J.M. Krijnen
, Meint J. de Boer
, J.H. de Boer
, M. Péter
, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

75 Citations (Scopus)

8 Downloads (Pure)

Abstract

We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.

Original language	Undefined
Pages (from-to)	5361-5363
Number of pages	3
Journal	Applied physics letters
Volume	85
Issue number	22
DOIs	https://doi.org/10.1063/1.1823040
Publication status	Published - 29 Nov 2004

Keywords

EWI-10030
METIS-219722
IR-48341

Access to Document

10.1063/1.1823040

http://eprints.eemcs.utwente.nl/secure2/10030/01/micromachined_fountain_pen_atomic_force_-_deladi.pdf

Cite this

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title = "Micromachined fountain pen for atomic force microscope-based nanopatterning",

abstract = "We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.",

keywords = "EWI-10030, METIS-219722, IR-48341",

author = "S. Deladi and Tas, \{Niels Roelof\} and Berenschot, \{Johan W.\} and Krijnen, \{Gijsbertus J.M.\} and \{de Boer\}, \{Meint J.\} and \{de Boer\}, J.H. and M. P{\'e}ter and Elwenspoek, \{Michael Curt\}",

year = "2004",

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day = "29",

doi = "10.1063/1.1823040",

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volume = "85",

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T1 - Micromachined fountain pen for atomic force microscope-based nanopatterning

AU - Deladi, S.

AU - Tas, Niels Roelof

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - de Boer, Meint J.

AU - de Boer, J.H.

AU - Péter, M.

AU - Elwenspoek, Michael Curt

PY - 2004/11/29

Y1 - 2004/11/29

N2 - We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.

AB - We present a tool that can be used in standard atomic force microscope and that enables chemical, chemical/mechanical, or physical surface modification using continuous liquid supply. The device consists of a reservoir micromachined into the probe support that is connected to fluidic channels embedded in a V-shaped cantilever. Via the fluidic channels, the liquid reaches the tip. The fluid transport to the sample surface is demonstrated and fountain pen lithography applications are presented.

KW - EWI-10030

KW - METIS-219722

KW - IR-48341

U2 - 10.1063/1.1823040

DO - 10.1063/1.1823040

M3 - Article

SN - 0003-6951

VL - 85

SP - 5361

EP - 5363

JO - Applied physics letters

JF - Applied physics letters

IS - 22

ER -