Micromachined hydraulic astable multivibrator

Theodorus S.J. Lammerink, Niels Roelof Tas, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    12 Citations (Scopus)
    112 Downloads (Pure)

    Abstract

    The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.
    Original languageUndefined
    Title of host publicationMicro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
    Place of PublicationPiscataway
    PublisherIEEE
    Pages13-18
    Number of pages6
    ISBN (Print)0-7803-2503-6
    DOIs
    Publication statusPublished - 29 Jan 1995
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
    Duration: 29 Jan 19952 Feb 1995

    Publication series

    Name
    PublisherIEEE

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Abbreviated titleMEMS
    CountryNetherlands
    CityAmsterdam
    Period29/01/952/02/95

    Keywords

    • IR-17228
    • METIS-114123
    • EWI-13890

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