Micromachined hydraulic astable multivibrator

Theodorus S.J. Lammerink, Niels Roelof Tas, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of IEEE workshop on Micro Electro Mechanical Systems (MEMS) '95
    Place of PublicationAmsterdam
    Publication statusPublished - 29 Jan 1995


    • METIS-130379

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