Original language | Undefined |
---|---|
Title of host publication | Proceedings of IEEE workshop on Micro Electro Mechanical Systems (MEMS) '95 |
Place of Publication | Amsterdam |
Pages | 13-18 |
Publication status | Published - 29 Jan 1995 |
Keywords
- METIS-130379
Theodorus S.J. Lammerink, Niels Roelof Tas, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Original language | Undefined |
---|---|
Title of host publication | Proceedings of IEEE workshop on Micro Electro Mechanical Systems (MEMS) '95 |
Place of Publication | Amsterdam |
Pages | 13-18 |
Publication status | Published - 29 Jan 1995 |