Micromachined hydraulic astable multivibrator

Theodorus S.J. Lammerink; Niels Roelof Tas; Johan W. Berenschot; Michael Curt Elwenspoek; J.H.J. Fluitman

doi:10.1109/MEMSYS.1995.472561

Micromachined hydraulic astable multivibrator

Theodorus S.J. Lammerink
, Niels Roelof Tas
, Johan W. Berenschot
, Michael Curt Elwenspoek
, J.H.J. Fluitman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

17 Citations (Scopus)

297 Downloads (Pure)

Abstract

The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.

Original language	Undefined
Title of host publication	Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Place of Publication	Piscataway
Publisher	IEEE
Pages	13-18
Number of pages	6
ISBN (Print)	0-7803-2503-6
DOIs	https://doi.org/10.1109/MEMSYS.1995.472561
Publication status	Published - 29 Jan 1995
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands Duration: 29 Jan 1995 → 2 Feb 1995

Publication series

Name
Publisher	IEEE

Workshop

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
Abbreviated title	MEMS
Country/Territory	Netherlands
City	Amsterdam
Period	29/01/95 → 2/02/95

Keywords

IR-17228
METIS-114123
EWI-13890

Access to Document

10.1109/MEMSYS.1995.472561

http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=472561

Cite this

@inproceedings{f39f2cbb815b43f0aca22a493e58ce8a,

title = "Micromachined hydraulic astable multivibrator",

abstract = "The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90\% of the supply pressure.",

keywords = "IR-17228, METIS-114123, EWI-13890",

author = "Lammerink, \{Theodorus S.J.\} and Tas, \{Niels Roelof\} and Berenschot, \{Johan W.\} and Elwenspoek, \{Michael Curt\} and J.H.J. Fluitman",

year = "1995",

month = jan,

day = "29",

doi = "10.1109/MEMSYS.1995.472561",

language = "Undefined",

isbn = "0-7803-2503-6",

publisher = "IEEE",

pages = "13--18",

booktitle = "Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE",

address = "United States",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 ; Conference date: 29-01-1995 Through 02-02-1995",

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T1 - Micromachined hydraulic astable multivibrator

AU - Lammerink, Theodorus S.J.

AU - Tas, Niels Roelof

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

AU - Fluitman, J.H.J.

PY - 1995/1/29

Y1 - 1995/1/29

N2 - The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.

AB - The paper presents a hydraulic astable multivibrator system. The system consists of hydraulic resistors, hydraulic capacitors and hydraulic pressure controlled valves. The system is designed, realised and tested. The measured system behaviour agrees well with the model simulations. The free running frequency of the multivibrator is 0.18 Hz and the output pressure swing is 90% of the supply pressure.

KW - IR-17228

KW - METIS-114123

KW - EWI-13890

U2 - 10.1109/MEMSYS.1995.472561

DO - 10.1109/MEMSYS.1995.472561

M3 - Conference contribution

SN - 0-7803-2503-6

SP - 13

EP - 18

BT - Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE

PB - IEEE

CY - Piscataway

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995

Y2 - 29 January 1995 through 2 February 1995

ER -