Micromachined Joule-Thomson coolers

P.P.M. Lerou; Hermanus J.M. ter Brake; Henricus V. Jansen; Johannes Faas Burger; Herman J. Holland; Horst Rogalla

doi:10.1063/1.2908606

Micromachined Joule-Thomson coolers

P.P.M. Lerou, Hermanus J.M. ter Brake, Henricus V. Jansen, Johannes Faas Burger, Herman J. Holland, Horst Rogalla

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

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Abstract

A MEMS-based Joule-Thomson cold stage was designed and prototypes were realized and tested. The cold stage consists of a stack of three glass wafers. In the top wafer, a high-pressure channel is etched that ends in a flow restriction with a height of typically 300 nm. An evaporator volume crosses the center wafer into the bottom wafer. This bottom wafer contains the low-pressure channel thus forming a counter-flow heat exchanger. A design aiming at a net cooling power of 10 mW at 96 K and operating with nitrogen as the working fluid was optimized based on the minimization of entropy production. A batch of prototype coolers ranging from 20 to 40 mm was made for a flow of typically 1mgĊs-1 at a high pressure of 80 bar and a low pressure of 6 bar. The design and fabrication of the coolers will be discussed along with experimental results. A specific issue that will be addressed is the clogging of the restriction due to the deposition of ice crystals. Furthermore, introductory experiments with multistage microcoolers will be discussed. © 2008 American Institute of Physics.

Original language	English
Title of host publication	Advances in Cryogenic Engineering
Subtitle of host publication	Transactions of the Cryogenic Engineering Conference - CEC 2007
Editors	J.G. Weisend, John Barclay, Susan Breon, Jonathan Demko, Michael DiPirro, J. Patrick Kelley, Peter Kittel, Arkadiy Klebaner, Al Zeller, Mark Zagarola, Andrew Rowe, Steven Van Sciver, John Pfotenhauer, Tom Peterson, Jennifer Lock
Place of Publication	Melville, NY, USA
Publisher	American Institute of Physics
Pages	614-621
Number of pages	8
ISBN (Print)	978-0-7354-0504-2
DOIs	https://doi.org/10.1063/1.2908606
Publication status	Published - 16 Mar 2008
Event	2007 Cryogenic Engineering Conference and International Cryogenic Materials Conference, CEC/ICMC 2007: Transactions of the Cryogenic Engineering Conference - CEC, vol. 53 - Chattanooga Convention Center, Chattanooga, United States Duration: 16 Jul 2007 → 20 Jul 2007 http://www.cec-icmc.org/cec-icmc-2007/

Publication series

Name	AIP Conference Proceedings
Publisher	AIP
Number	1
Volume	985
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Conference

Conference	2007 Cryogenic Engineering Conference and International Cryogenic Materials Conference, CEC/ICMC 2007
Abbreviated title	CEC/ICMC
Country/Territory	United States
City	Chattanooga
Period	16/07/07 → 20/07/07
Internet address	http://www.cec-icmc.org/cec-icmc-2007/

Keywords

METIS-252485
IR-62569
EWI-14259
MEMS
Micro Cooling
Joule–Thomson

Access to Document

10.1063/1.2908606

Cite this

Lerou, P. P. M., ter Brake, H. J. M., Jansen, H. V., Burger, J. F., Holland, H. J., & Rogalla, H. (2008). Micromachined Joule-Thomson coolers. In J. G. Weisend, J. Barclay, S. Breon, J. Demko, M. DiPirro, J. P. Kelley, P. Kittel, A. Klebaner, A. Zeller, M. Zagarola, A. Rowe, S. Van Sciver, J. Pfotenhauer, T. Peterson, & J. Lock (Eds.), Advances in Cryogenic Engineering: Transactions of the Cryogenic Engineering Conference - CEC 2007 (pp. 614-621). (AIP Conference Proceedings; Vol. 985, No. 1). American Institute of Physics. https://doi.org/10.1063/1.2908606

Lerou, P.P.M. ; ter Brake, Hermanus J.M. ; Jansen, Henricus V. et al. / Micromachined Joule-Thomson coolers. Advances in Cryogenic Engineering: Transactions of the Cryogenic Engineering Conference - CEC 2007. editor / J.G. Weisend ; John Barclay ; Susan Breon ; Jonathan Demko ; Michael DiPirro ; J. Patrick Kelley ; Peter Kittel ; Arkadiy Klebaner ; Al Zeller ; Mark Zagarola ; Andrew Rowe ; Steven Van Sciver ; John Pfotenhauer ; Tom Peterson ; Jennifer Lock. Melville, NY, USA : American Institute of Physics, 2008. pp. 614-621 (AIP Conference Proceedings; 1).

@inproceedings{a72f64032c884060b81e5b33bb603da1,

title = "Micromachined Joule-Thomson coolers",

abstract = "A MEMS-based Joule-Thomson cold stage was designed and prototypes were realized and tested. The cold stage consists of a stack of three glass wafers. In the top wafer, a high-pressure channel is etched that ends in a flow restriction with a height of typically 300 nm. An evaporator volume crosses the center wafer into the bottom wafer. This bottom wafer contains the low-pressure channel thus forming a counter-flow heat exchanger. A design aiming at a net cooling power of 10 mW at 96 K and operating with nitrogen as the working fluid was optimized based on the minimization of entropy production. A batch of prototype coolers ranging from 20 to 40 mm was made for a flow of typically 1mg{\.C}s-1 at a high pressure of 80 bar and a low pressure of 6 bar. The design and fabrication of the coolers will be discussed along with experimental results. A specific issue that will be addressed is the clogging of the restriction due to the deposition of ice crystals. Furthermore, introductory experiments with multistage microcoolers will be discussed. {\textcopyright} 2008 American Institute of Physics.",

keywords = "METIS-252485, IR-62569, EWI-14259, MEMS, Micro Cooling, Joule–Thomson",

author = "P.P.M. Lerou and {ter Brake}, {Hermanus J.M.} and Jansen, {Henricus V.} and Burger, {Johannes Faas} and Holland, {Herman J.} and Horst Rogalla",

year = "2008",

month = mar,

day = "16",

doi = "10.1063/1.2908606",

language = "English",

isbn = "978-0-7354-0504-2",

series = "AIP Conference Proceedings",

publisher = "American Institute of Physics",

number = "1",

pages = "614--621",

editor = "J.G. Weisend and John Barclay and Susan Breon and Jonathan Demko and Michael DiPirro and Kelley, {J. Patrick} and Peter Kittel and Arkadiy Klebaner and Al Zeller and Mark Zagarola and Andrew Rowe and {Van Sciver}, Steven and John Pfotenhauer and Tom Peterson and Jennifer Lock",

booktitle = "Advances in Cryogenic Engineering",

address = "United States",

note = "2007 Cryogenic Engineering Conference and International Cryogenic Materials Conference, CEC/ICMC 2007 : Transactions of the Cryogenic Engineering Conference - CEC, vol. 53, CEC/ICMC ; Conference date: 16-07-2007 Through 20-07-2007",

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Lerou, PPM, ter Brake, HJM, Jansen, HV, Burger, JF , Holland, HJ & Rogalla, H 2008, Micromachined Joule-Thomson coolers. in JG Weisend, J Barclay, S Breon, J Demko, M DiPirro, JP Kelley, P Kittel, A Klebaner, A Zeller, M Zagarola, A Rowe, S Van Sciver, J Pfotenhauer, T Peterson & J Lock (eds), Advances in Cryogenic Engineering: Transactions of the Cryogenic Engineering Conference - CEC 2007. AIP Conference Proceedings, no. 1, vol. 985, American Institute of Physics, Melville, NY, USA, pp. 614-621, 2007 Cryogenic Engineering Conference and International Cryogenic Materials Conference, CEC/ICMC 2007, Chattanooga, Tennessee, United States, 16/07/07. https://doi.org/10.1063/1.2908606

Micromachined Joule-Thomson coolers. / Lerou, P.P.M.; ter Brake, Hermanus J.M.; Jansen, Henricus V. et al.
Advances in Cryogenic Engineering: Transactions of the Cryogenic Engineering Conference - CEC 2007. ed. / J.G. Weisend; John Barclay; Susan Breon; Jonathan Demko; Michael DiPirro; J. Patrick Kelley; Peter Kittel; Arkadiy Klebaner; Al Zeller; Mark Zagarola; Andrew Rowe; Steven Van Sciver; John Pfotenhauer; Tom Peterson; Jennifer Lock. Melville, NY, USA: American Institute of Physics, 2008. p. 614-621 (AIP Conference Proceedings; Vol. 985, No. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Micromachined Joule-Thomson coolers

AU - Lerou, P.P.M.

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AU - Jansen, Henricus V.

AU - Burger, Johannes Faas

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AU - Rogalla, Horst

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N2 - A MEMS-based Joule-Thomson cold stage was designed and prototypes were realized and tested. The cold stage consists of a stack of three glass wafers. In the top wafer, a high-pressure channel is etched that ends in a flow restriction with a height of typically 300 nm. An evaporator volume crosses the center wafer into the bottom wafer. This bottom wafer contains the low-pressure channel thus forming a counter-flow heat exchanger. A design aiming at a net cooling power of 10 mW at 96 K and operating with nitrogen as the working fluid was optimized based on the minimization of entropy production. A batch of prototype coolers ranging from 20 to 40 mm was made for a flow of typically 1mgĊs-1 at a high pressure of 80 bar and a low pressure of 6 bar. The design and fabrication of the coolers will be discussed along with experimental results. A specific issue that will be addressed is the clogging of the restriction due to the deposition of ice crystals. Furthermore, introductory experiments with multistage microcoolers will be discussed. © 2008 American Institute of Physics.

AB - A MEMS-based Joule-Thomson cold stage was designed and prototypes were realized and tested. The cold stage consists of a stack of three glass wafers. In the top wafer, a high-pressure channel is etched that ends in a flow restriction with a height of typically 300 nm. An evaporator volume crosses the center wafer into the bottom wafer. This bottom wafer contains the low-pressure channel thus forming a counter-flow heat exchanger. A design aiming at a net cooling power of 10 mW at 96 K and operating with nitrogen as the working fluid was optimized based on the minimization of entropy production. A batch of prototype coolers ranging from 20 to 40 mm was made for a flow of typically 1mgĊs-1 at a high pressure of 80 bar and a low pressure of 6 bar. The design and fabrication of the coolers will be discussed along with experimental results. A specific issue that will be addressed is the clogging of the restriction due to the deposition of ice crystals. Furthermore, introductory experiments with multistage microcoolers will be discussed. © 2008 American Institute of Physics.

KW - METIS-252485

KW - IR-62569

KW - EWI-14259

KW - MEMS

KW - Micro Cooling

KW - Joule–Thomson

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DO - 10.1063/1.2908606

M3 - Conference contribution

SN - 978-0-7354-0504-2

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A2 - Barclay, John

A2 - Breon, Susan

A2 - Demko, Jonathan

A2 - DiPirro, Michael

A2 - Kelley, J. Patrick

A2 - Kittel, Peter

A2 - Klebaner, Arkadiy

A2 - Zeller, Al

A2 - Zagarola, Mark

A2 - Rowe, Andrew

A2 - Van Sciver, Steven

A2 - Pfotenhauer, John

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Lerou PPM, ter Brake HJM, Jansen HV, Burger JF , Holland HJ, Rogalla H. Micromachined Joule-Thomson coolers. In Weisend JG, Barclay J, Breon S, Demko J, DiPirro M, Kelley JP, Kittel P, Klebaner A, Zeller A, Zagarola M, Rowe A, Van Sciver S, Pfotenhauer J, Peterson T, Lock J, editors, Advances in Cryogenic Engineering: Transactions of the Cryogenic Engineering Conference - CEC 2007. Melville, NY, USA: American Institute of Physics. 2008. p. 614-621. (AIP Conference Proceedings; 1). doi: 10.1063/1.2908606

Micromachined Joule-Thomson coolers

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