Micromachined Joule-Thomson coolers

P.P.M. Lerou, Hermanus J.M. ter Brake, Henricus V. Jansen, Johannes Faas Burger, Herman J. Holland, Horst Rogalla

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)


A MEMS-based Joule-Thomson cold stage was designed and prototypes were realized and tested. The cold stage consists of a stack of three glass wafers. In the top wafer, a high-pressure channel is etched that ends in a flow restriction with a height of typically 300 nm. An evaporator volume crosses the center wafer into the bottom wafer. This bottom wafer contains the low-pressure channel thus forming a counter-flow heat exchanger. A design aiming at a net cooling power of 10 mW at 96 K and operating with nitrogen as the working fluid was optimized based on the minimization of entropy production. A batch of prototype coolers ranging from 20 to 40 mm was made for a flow of typically 1mgĊs-1 at a high pressure of 80 bar and a low pressure of 6 bar. The design and fabrication of the coolers will be discussed along with experimental results. A specific issue that will be addressed is the clogging of the restriction due to the deposition of ice crystals. Furthermore, introductory experiments with multistage microcoolers will be discussed. © 2008 American Institute of Physics.
Original languageEnglish
Title of host publicationAdvances in Cryogenic Engineering
Subtitle of host publicationTransactions of the Cryogenic Engineering Conference - CEC 2007
EditorsJ.G. Weisend, John Barclay, Susan Breon, Jonathan Demko, Michael DiPirro, J. Patrick Kelley, Peter Kittel, Arkadiy Klebaner, Al Zeller, Mark Zagarola, Andrew Rowe, Steven Van Sciver, John Pfotenhauer, Tom Peterson, Jennifer Lock
Place of PublicationMelville, NY, USA
Number of pages8
ISBN (Print)978-0-7354-0504-2
Publication statusPublished - 16 Mar 2008
Event2007 Cryogenic Engineering Conference and International Cryogenic Materials Conference, CEC/ICMC 2007: Transactions of the Cryogenic Engineering Conference - CEC, vol. 53 - Chattanooga Convention Center, Chattanooga, United States
Duration: 16 Jul 200720 Jul 2007

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Conference2007 Cryogenic Engineering Conference and International Cryogenic Materials Conference, CEC/ICMC 2007
Abbreviated titleCEC/ICMC
Country/TerritoryUnited States
Internet address


  • METIS-252485
  • IR-62569
  • EWI-14259
  • MEMS
  • Micro Cooling
  • Joule–Thomson


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