Micromachined linear motor

Niels Roelof Tas, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationEnschede, Dish Hotel
    Publication statusPublished - 14 Jun 1995

    Keywords

    • METIS-114952

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