| Original language | Undefined |
|---|---|
| Place of Publication | Enschede, Dish Hotel |
| Publication status | Published - 14 Jun 1995 |
Keywords
- METIS-114952
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Micromachined linear motor
- Niels Roelof Tas
- , Michael Curt Elwenspoek
- , J.H.J. Fluitman
Research output: Other contribution › Other research output