Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation

D.H. Tong, F.C. Gielens, H.T.H. Hoang Thi Hanh, Johan W. Berenschot, Meint J. de Boer, Johannes G.E. Gardeniers, Henricus V. Jansen, W. Nijdam, C.J.M. van Rijn, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    16 Downloads (Pure)


    A thin but strong and defect free palladium-silver (Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up to 3 bars at room temperature. High flow rates of up to 3.6 mol H/sub 2//m/sup 2/.s have been measured with a minimal selectivity of 1500 for H/sub 2//He. The membranes survived operation at 450/spl deg/C, which is a temperature relevant for practical application in industry, for more than 1000 hours.
    Original languageUndefined
    Title of host publicationSESENS 2002
    Place of PublicationUtrecht
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - 8 Jun 2003
    EventSESENS 2002 - Veldhoven, Netherlands
    Duration: 29 Nov 200230 Nov 2002


    WorkshopSESENS 2002


    • EWI-19254

    Cite this