Micromachined palladium silver alloy membranes for hydrogen separation

D.H. Tong, F.C. Gielens, Johan W. Berenschot, Meint J. de Boer, Johannes G.E. Gardeniers, Henricus V. Jansen, W. Nijdam, C.J.M. van Rijn, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates of 1 mol H2 /m2.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes have high mechanical strength and can withstand pressures up to 4 bars at room temperature. These membranes have the potential to be used for hydrogen purification and other applications such as membrane reactors for hydrogenation/dehydrogenation reactions. The presented fabrication method also allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates.
Original languageUndefined
Title of host publicationProceedings of SESENS 2002
Place of PublicationVeldhoven
Publication statusPublished - 27 Nov 2002
EventSESENS 2002 - Veldhoven, Netherlands
Duration: 29 Nov 200230 Nov 2002


WorkshopSESENS 2002


  • METIS-207639
  • IR-43881

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