Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation

D.H. Tong; F.C. Gielens; J.W. Berenschot; M.J. de Boer; J.G.E. Gardeniers; H.V. Jansen; W. Nijdam; C.J.M. van Rijn; M.C. Elwenspoek

Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation

D.H. Tong, F.C. Gielens, J.W. Berenschot, M.J. de Boer, J.G.E. Gardeniers, H.V. Jansen, W. Nijdam, C.J.M. van Rijn, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

65 Downloads (Pure)

Abstract

This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates of 1 mol H2 /m2.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes have high mechanical strength and can withstand pressures up to 4 bars at room temperature. These membranes have the potential to be used for hydrogen purification and other applications such as membrane reactors for hydrogenation/dehydrogenation reactions. The presented fabrication method also allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates.

Original language	English
Title of host publication	Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
Place of Publication	Utrecht
Publisher	STW
Pages	688-691
Number of pages	4
ISBN (Print)	90-73461-33-2
Publication status	Published - 2002
Event	Semiconductor Sensor and Actuator Technology, SeSens 2002 - Veldhoven, Netherlands Duration: 29 Nov 2002 → 30 Nov 2002

Workshop

Workshop	Semiconductor Sensor and Actuator Technology, SeSens 2002
Country/Territory	Netherlands
City	Veldhoven
Period	29/11/02 → 30/11/02

Access to Document

Tong2002micromachinedFinal published version, 124 KB
Tong02micromachinedFinal published version, 124 KB

Cite this

@inproceedings{fceb8705056841be91d39cae0454c434,

title = "Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation",

abstract = "This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates of 1 mol H2 /m2.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes have high mechanical strength and can withstand pressures up to 4 bars at room temperature. These membranes have the potential to be used for hydrogen purification and other applications such as membrane reactors for hydrogenation/dehydrogenation reactions. The presented fabrication method also allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates.",

author = "D.H. Tong and F.C. Gielens and J.W. Berenschot and \{de Boer\}, M.J. and J.G.E. Gardeniers and H.V. Jansen and W. Nijdam and \{van Rijn\}, C.J.M. and M.C. Elwenspoek",

year = "2002",

language = "English",

isbn = "90-73461-33-2",

pages = "688--691",

booktitle = "Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002",

publisher = "STW",

note = "Semiconductor Sensor and Actuator Technology, SeSens 2002 ; Conference date: 29-11-2002 Through 30-11-2002",

}

Tong, DH, Gielens, FC, Berenschot, JW, de Boer, MJ, Gardeniers, JGE, Jansen, HV, Nijdam, W, van Rijn, CJM & Elwenspoek, MC 2002, Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation. in Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. STW, Utrecht, pp. 688-691, Semiconductor Sensor and Actuator Technology, SeSens 2002, Veldhoven, Netherlands, 29/11/02.

TY - GEN

T1 - Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation

AU - Tong, D.H.

AU - Gielens, F.C.

AU - Berenschot, J.W.

AU - de Boer, M.J.

AU - Gardeniers, J.G.E.

AU - Jansen, H.V.

AU - Nijdam, W.

AU - van Rijn, C.J.M.

AU - Elwenspoek, M.C.

PY - 2002

Y1 - 2002

N2 - This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates of 1 mol H2 /m2.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes have high mechanical strength and can withstand pressures up to 4 bars at room temperature. These membranes have the potential to be used for hydrogen purification and other applications such as membrane reactors for hydrogenation/dehydrogenation reactions. The presented fabrication method also allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates.

AB - This paper presents wafer-scale palladium - silver alloy membranes, fabricated with a sequence of wellknown thin film and silicon micromachining techniques. The membranes have been tested in a gas permeation system to determine the hydrogen permeability and hydrogen selectivity. Typical flow rates of 1 mol H2 /m2.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes have high mechanical strength and can withstand pressures up to 4 bars at room temperature. These membranes have the potential to be used for hydrogen purification and other applications such as membrane reactors for hydrogenation/dehydrogenation reactions. The presented fabrication method also allows the development of a module for industrial applications that consists of a stack with a large number of glass/membrane plates.

M3 - Conference contribution

SN - 90-73461-33-2

SP - 688

EP - 691

BT - Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002

PB - STW

CY - Utrecht

T2 - Semiconductor Sensor and Actuator Technology, SeSens 2002

Y2 - 29 November 2002 through 30 November 2002

ER -

Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation

Abstract

Workshop

Access to Document

Fingerprint

Cite this