Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation

D.H. Tong, F.C. Gielens, J.W. Berenschot, M.J. de Boer, J.G.E. Gardeniers, H.V. Jansen, W. Nijdam, C.J.M. van Rijn, M.C. Elwenspoek

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Physics & Astronomy