In microelectromechanical systems (MEMS), parallel plate structures with sub-micron separation have been of much use in various types of sensors and actuators. In this thesis such parallel plate structures are employed for two applications viz. the Casimir force measurement and to develop a mechano-optical modulator. Both research studies are focussed on realising parallel plate structures with a separation distance in the order of 1 μm or less.
|Award date||22 Nov 2013|
|Place of Publication||Enschede|
|Publication status||Published - 22 Nov 2013|