Micromachined parallel plate structures for Casimir force measurement and optical modulation

M.B. Syed Nawazuddin

doi:10.3990/1.9789036535687

Micromachined parallel plate structures for Casimir force measurement and optical modulation

M.B. Syed Nawazuddin

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Abstract

In microelectromechanical systems (MEMS), parallel plate structures with sub-micron separation have been of much use in various types of sensors and actuators. In this thesis such parallel plate structures are employed for two applications viz. the Casimir force measurement and to develop a mechano-optical modulator. Both research studies are focussed on realising parallel plate structures with a separation distance in the order of 1 μm or less.

Original language	Undefined
Awarding Institution	University of Twente
Supervisors/Advisors	Elwenspoek, Michael Curt, Supervisor Wiegerink, Remco J., Advisor
Thesis sponsors	SmartMix
Award date	22 Nov 2013
Place of Publication	Enschede
Publisher	Universiteit Twente
Print ISBNs	978-90-365-3568-7
DOIs	https://doi.org/10.3990/1.9789036535687
Publication status	Published - 22 Nov 2013

Keywords

METIS-298944
EWI-24359
IR-87862

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Cite this

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title = "Micromachined parallel plate structures for Casimir force measurement and optical modulation",

abstract = "In microelectromechanical systems (MEMS), parallel plate structures with sub-micron separation have been of much use in various types of sensors and actuators. In this thesis such parallel plate structures are employed for two applications viz. the Casimir force measurement and to develop a mechano-optical modulator. Both research studies are focussed on realising parallel plate structures with a separation distance in the order of 1 μm or less.",

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AB - In microelectromechanical systems (MEMS), parallel plate structures with sub-micron separation have been of much use in various types of sensors and actuators. In this thesis such parallel plate structures are employed for two applications viz. the Casimir force measurement and to develop a mechano-optical modulator. Both research studies are focussed on realising parallel plate structures with a separation distance in the order of 1 μm or less.

KW - METIS-298944

KW - EWI-24359

KW - IR-87862

U2 - 10.3990/1.9789036535687

DO - 10.3990/1.9789036535687

M3 - PhD Thesis - Research UT, graduation UT

SN - 978-90-365-3568-7

PB - Universiteit Twente

CY - Enschede

ER -