Abstract
In microelectromechanical systems (MEMS), parallel plate structures with sub-micron
separation have been of much use in various types of sensors and actuators. In this thesis
such parallel plate structures are employed for two applications viz. the Casimir force
measurement and to develop a mechano-optical modulator. Both research studies are
focussed on realising parallel plate structures with a separation distance in the order of 1
μm or less.
Original language | Undefined |
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Awarding Institution |
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Supervisors/Advisors |
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Thesis sponsors | |
Award date | 22 Nov 2013 |
Place of Publication | Enschede |
Publisher | |
Print ISBNs | 978-90-365-3568-7 |
DOIs | |
Publication status | Published - 22 Nov 2013 |
Keywords
- METIS-298944
- EWI-24359
- IR-87862