Micromachined parallel plate structures for Casimir force measurement and optical modulation

M.B. Syed Nawazuddin

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    130 Downloads (Pure)

    Abstract

    In microelectromechanical systems (MEMS), parallel plate structures with sub-micron separation have been of much use in various types of sensors and actuators. In this thesis such parallel plate structures are employed for two applications viz. the Casimir force measurement and to develop a mechano-optical modulator. Both research studies are focussed on realising parallel plate structures with a separation distance in the order of 1 μm or less.
    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Elwenspoek, Michael Curt, Supervisor
    • Wiegerink, Remco J., Advisor
    Thesis sponsors
    Award date22 Nov 2013
    Place of PublicationEnschede
    Publisher
    Print ISBNs978-90-365-3568-7
    DOIs
    Publication statusPublished - 22 Nov 2013

    Keywords

    • METIS-298944
    • EWI-24359
    • IR-87862

    Cite this