Micromachined pressure/flow-sensor

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Abstract

The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics, is discussed. Two separate pressure sensors are used for the device, enabling to measure both, pressure as well as volume flow-rate. An integrated sensor with capacitive read-out as well as a hybrid, piezo-resistive variant is made. The fabrication processes are described, using silicon and glass processing techniques. Based on the sensor layout, equations are derived to describe the sensor behavior both statically as well as dynamically. With the derived equations, the working range of the sensor and the thermal and time stability is estimated. The computed results of the stationary behavior are verified with the measured data. A good similarity in linearity of the pressure/flow relation is found. The computed hydraulic resistance, however, differs from the measured value for water with 21%. This difference can be explained by the high sensitivity of the resistance to the resistor channel cross-section parameter in combination with the difference between the rounded etched shape and the rectangular approximation. From fluid dynamics simulations, a working range bandwidth of about 1 kHz is expected. Thermal influences on the sensor signal due to viscosity changes are in the order of 2% flow signal variation per Kelvin. From these results, it can be concluded that the sensor can be used as a low cost, low power consuming flow and pressure-sensing device, for clean fluids without particles and without the tendency to coat the channel walls. If a high accuracy is wanted, an accurate temperature sensing or controlling system is needed.
Original languageUndefined
Pages (from-to)167-177
Number of pages11
JournalSensors and actuators. A: Physical
Volume1999
Issue number77
DOIs
Publication statusPublished - Nov 1999

Keywords

  • METIS-111695
  • IR-14606
  • EWI-13213

Cite this

@article{13eec3612d8145bd94099bf5cf65b303,
title = "Micromachined pressure/flow-sensor",
abstract = "The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics, is discussed. Two separate pressure sensors are used for the device, enabling to measure both, pressure as well as volume flow-rate. An integrated sensor with capacitive read-out as well as a hybrid, piezo-resistive variant is made. The fabrication processes are described, using silicon and glass processing techniques. Based on the sensor layout, equations are derived to describe the sensor behavior both statically as well as dynamically. With the derived equations, the working range of the sensor and the thermal and time stability is estimated. The computed results of the stationary behavior are verified with the measured data. A good similarity in linearity of the pressure/flow relation is found. The computed hydraulic resistance, however, differs from the measured value for water with 21{\%}. This difference can be explained by the high sensitivity of the resistance to the resistor channel cross-section parameter in combination with the difference between the rounded etched shape and the rectangular approximation. From fluid dynamics simulations, a working range bandwidth of about 1 kHz is expected. Thermal influences on the sensor signal due to viscosity changes are in the order of 2{\%} flow signal variation per Kelvin. From these results, it can be concluded that the sensor can be used as a low cost, low power consuming flow and pressure-sensing device, for clean fluids without particles and without the tendency to coat the channel walls. If a high accuracy is wanted, an accurate temperature sensing or controlling system is needed.",
keywords = "METIS-111695, IR-14606, EWI-13213",
author = "R.E. Oosterbroek and Lammerink, {Theodorus S.J.} and Berenschot, {Johan W.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert",
year = "1999",
month = "11",
doi = "10.1016/S0924-4247(99)00188-0",
language = "Undefined",
volume = "1999",
pages = "167--177",
journal = "Sensors and actuators. A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "77",

}

Micromachined pressure/flow-sensor. / Oosterbroek, R.E.; Lammerink, Theodorus S.J.; Berenschot, Johan W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt; van den Berg, Albert.

In: Sensors and actuators. A: Physical, Vol. 1999, No. 77, 11.1999, p. 167-177.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Micromachined pressure/flow-sensor

AU - Oosterbroek, R.E.

AU - Lammerink, Theodorus S.J.

AU - Berenschot, Johan W.

AU - Krijnen, Gijsbertus J.M.

AU - Elwenspoek, Michael Curt

AU - van den Berg, Albert

PY - 1999/11

Y1 - 1999/11

N2 - The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics, is discussed. Two separate pressure sensors are used for the device, enabling to measure both, pressure as well as volume flow-rate. An integrated sensor with capacitive read-out as well as a hybrid, piezo-resistive variant is made. The fabrication processes are described, using silicon and glass processing techniques. Based on the sensor layout, equations are derived to describe the sensor behavior both statically as well as dynamically. With the derived equations, the working range of the sensor and the thermal and time stability is estimated. The computed results of the stationary behavior are verified with the measured data. A good similarity in linearity of the pressure/flow relation is found. The computed hydraulic resistance, however, differs from the measured value for water with 21%. This difference can be explained by the high sensitivity of the resistance to the resistor channel cross-section parameter in combination with the difference between the rounded etched shape and the rectangular approximation. From fluid dynamics simulations, a working range bandwidth of about 1 kHz is expected. Thermal influences on the sensor signal due to viscosity changes are in the order of 2% flow signal variation per Kelvin. From these results, it can be concluded that the sensor can be used as a low cost, low power consuming flow and pressure-sensing device, for clean fluids without particles and without the tendency to coat the channel walls. If a high accuracy is wanted, an accurate temperature sensing or controlling system is needed.

AB - The micromechanical equivalent of a differential pressure flow-sensor, well known in macro mechanics, is discussed. Two separate pressure sensors are used for the device, enabling to measure both, pressure as well as volume flow-rate. An integrated sensor with capacitive read-out as well as a hybrid, piezo-resistive variant is made. The fabrication processes are described, using silicon and glass processing techniques. Based on the sensor layout, equations are derived to describe the sensor behavior both statically as well as dynamically. With the derived equations, the working range of the sensor and the thermal and time stability is estimated. The computed results of the stationary behavior are verified with the measured data. A good similarity in linearity of the pressure/flow relation is found. The computed hydraulic resistance, however, differs from the measured value for water with 21%. This difference can be explained by the high sensitivity of the resistance to the resistor channel cross-section parameter in combination with the difference between the rounded etched shape and the rectangular approximation. From fluid dynamics simulations, a working range bandwidth of about 1 kHz is expected. Thermal influences on the sensor signal due to viscosity changes are in the order of 2% flow signal variation per Kelvin. From these results, it can be concluded that the sensor can be used as a low cost, low power consuming flow and pressure-sensing device, for clean fluids without particles and without the tendency to coat the channel walls. If a high accuracy is wanted, an accurate temperature sensing or controlling system is needed.

KW - METIS-111695

KW - IR-14606

KW - EWI-13213

U2 - 10.1016/S0924-4247(99)00188-0

DO - 10.1016/S0924-4247(99)00188-0

M3 - Article

VL - 1999

SP - 167

EP - 177

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

SN - 0924-4247

IS - 77

ER -