Micromachined silicon integrated resonant sensors

C.J. van Mullem

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Fluitman, J.H.J., Supervisor
    • Wallinga, Hans, Supervisor
    • Elwenspoek, Michael Curt, Advisor
    Award date26 Aug 1993
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-9006379-X
    Publication statusPublished - 26 Aug 1993

    Keywords

    • METIS-111365

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