Micromachined silicon integrated sensors

C.J. van Mullem

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 26 Nov 1993
Event	FOM Symposium Wetenschappelijke Instrumentatie 1993 - Congrescentrum De Reehorst, Ede, Netherlands Duration: 26 Nov 1993 → 26 Nov 1993

Conference	FOM Symposium Wetenschappelijke Instrumentatie 1993
Country/Territory	Netherlands
City	Ede
Period	26/11/93 → 26/11/93

Keywords

@conference{6bd89a25b22f4614a574a003bba883df,

title = "Micromachined silicon integrated sensors",

keywords = "METIS-118001",

author = "{van Mullem}, C.J.",

year = "1993",

month = nov,

day = "26",

language = "English",

pages = "--",

note = "FOM Symposium Wetenschappelijke Instrumentatie 1993 ; Conference date: 26-11-1993 Through 26-11-1993",

}