Micromachined silicon plates for sensing molecular interactions

Edwin Carlen, M.S. Weinberg, C.E. Dube, A.M. Zapata, J.T. Borenstein

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    24 Citations (Scopus)


    A micromachined surface stress sensor based on a thin suspended crystalline silicon circular plate measures differential surface stress changes associated with vapor phase chemisorption of an alkanethiol self-assembled monolayer. The isolated face of the suspended silicon plate serves as the sensing surface treated with a receptor layer sensitive to a target molecule, in this case Au(111). Chemisorption of an alkanethiol on the gold coated silicon surfaces results in plate bending. Plate displacements, measured with a phase scanning interferometer, indicate a differential surface stress change $\Delta \sigma_s$=-0.72 +/- 0.02 N m(-1) for 1-dodecanethiol.
    Original languageUndefined
    Article number10.1063/1.2364878
    Pages (from-to)173123
    Number of pages3
    JournalApplied physics letters
    Issue number10/17
    Publication statusPublished - 26 Oct 2006


    • EWI-8351
    • IR-63729
    • METIS-237672
    • BIOS-Nanosensors

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