Micromachined silicon smart sensors

C.J. van Mullem, Michael Curt Elwenspoek, J.H.J. Fluitman, Hans Wallinga

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 26 Jun 1992
    EventMESA Dag 1992 - Universiteit Twente, Enschede, Netherlands
    Duration: 26 Jun 199226 Jun 1992

    Conference

    ConferenceMESA Dag 1992
    CountryNetherlands
    CityEnschede
    Period26/06/9226/06/92
    Other(MESA Day/Meeting)

    Keywords

    • METIS-117961

    Cite this

    van Mullem, C. J., Elwenspoek, M. C., Fluitman, J. H. J., & Wallinga, H. (1992). Micromachined silicon smart sensors. -. Poster session presented at MESA Dag 1992, Enschede, Netherlands.