Micromachined silicon smart sensors

C.J. van Mullem, Michael Curt Elwenspoek, J.H.J. Fluitman, Hans Wallinga

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 17 Nov 1992
Event	Wetenschappelijke Vergadering ProRISC, IOP Halfgeleiders 1992 - Veldhoven, Netherlands Duration: 17 Nov 1992 → 17 Nov 1992

Conference	Wetenschappelijke Vergadering ProRISC, IOP Halfgeleiders 1992
Country/Territory	Netherlands
City	Veldhoven
Period	17/11/92 → 17/11/92

Keywords

@conference{e99ee01e7e7049c8a2d2461419997c89,

title = "Micromachined silicon smart sensors",

keywords = "METIS-117960",

author = "{van Mullem}, C.J. and Elwenspoek, {Michael Curt} and J.H.J. Fluitman and Hans Wallinga",

year = "1992",

month = nov,

day = "17",

language = "Undefined",

pages = "--",

note = "Wetenschappelijke Vergadering ProRISC, IOP Halfgeleiders 1992 ; Conference date: 17-11-1992 Through 17-11-1992",

}