Micromachined silicon smart sensors

C.J. van Mullem, Michael Curt Elwenspoek, J.H.J. Fluitman, Hans Wallinga

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 17 Nov 1992
    EventWetenschappelijke Vergadering ProRISC, IOP Halfgeleiders 1992 - Veldhoven, Netherlands
    Duration: 17 Nov 199217 Nov 1992

    Conference

    ConferenceWetenschappelijke Vergadering ProRISC, IOP Halfgeleiders 1992
    CountryNetherlands
    CityVeldhoven
    Period17/11/9217/11/92

    Keywords

    • METIS-117960

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